Undulator radiation for at-wavelength interferometry of optics for extreme-ultraviolet lithography. (Record no. 20186706)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00928 a2200289 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20250516002902.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 201307s 0 0 eng d |
| 022 ## - INTERNATIONAL STANDARD SERIAL NUMBER | |
| International Standard Serial Number | 1559-128X |
| 024 7# - OTHER STANDARD IDENTIFIER | |
| Standard number or code | 10.1364/AO.32.007022 |
| Source of number or code | doi |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | NLM |
| Language of cataloging | eng |
| Transcribing agency | NLM |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Attwood, D |
| 264 #0 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE | |
| Date of production, publication, distribution, manufacture, or copyright notice | 20130704 |
| 245 00 - TITLE STATEMENT | |
| Title | Undulator radiation for at-wavelength interferometry of optics for extreme-ultraviolet lithography. |
| Medium | [electronic resource] |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Name of publisher, distributor, etc. | Applied optics |
| Date of publication, distribution, etc. | Dec 1993 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 7022-31 p. |
| Other physical details | digital |
| 500 ## - GENERAL NOTE | |
| General note | Publication Type: Journal Article |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Sommargren, G |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Beguiristain, R |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Nguyen, K |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Bokor, J |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Ceglio, N |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Jackson, K |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Koike, M |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Underwood, J |
| 773 0# - HOST ITEM ENTRY | |
| Title | Applied optics |
| Related parts | vol. 32 |
| -- | no. 34 |
| -- | p. 7022-31 |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | <a href="https://doi.org/10.1364/AO.32.007022">https://doi.org/10.1364/AO.32.007022</a> |
| Public note | Available from publisher's website |
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