Properties of broadband depth-graded multilayer mirrors for EUV optical systems. (Record no. 19748484)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01180 a2200361 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20250515220935.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 201010s 0 0 eng d |
| 022 ## - INTERNATIONAL STANDARD SERIAL NUMBER | |
| International Standard Serial Number | 1094-4087 |
| 024 7# - OTHER STANDARD IDENTIFIER | |
| Standard number or code | 10.1364/OE.18.006957 |
| Source of number or code | doi |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | NLM |
| Language of cataloging | eng |
| Transcribing agency | NLM |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Yakshin, A E |
| 264 #0 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE | |
| Date of production, publication, distribution, manufacture, or copyright notice | 20101022 |
| 245 00 - TITLE STATEMENT | |
| Title | Properties of broadband depth-graded multilayer mirrors for EUV optical systems. |
| Medium | [electronic resource] |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Name of publisher, distributor, etc. | Optics express |
| Date of publication, distribution, etc. | Mar 2010 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 6957-71 p. |
| Other physical details | digital |
| 500 ## - GENERAL NOTE | |
| General note | Publication Type: Journal Article; Research Support, Non-U.S. Gov't |
| 650 04 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Algorithms |
| 650 04 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Equipment Design |
| 650 04 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Models, Statistical |
| 650 04 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Optical Devices |
| 650 04 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Optics and Photonics |
| 650 04 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Physics |
| General subdivision | methods |
| 650 04 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Reproducibility of Results |
| 650 04 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Scattering, Radiation |
| 650 04 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Surface Properties |
| 650 04 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Time Factors |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Kozhevnikov, I V |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Zoethout, E |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Louis, E |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Bijkerk, F |
| 773 0# - HOST ITEM ENTRY | |
| Title | Optics express |
| Related parts | vol. 18 |
| -- | no. 7 |
| -- | p. 6957-71 |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | <a href="https://doi.org/10.1364/OE.18.006957">https://doi.org/10.1364/OE.18.006957</a> |
| Public note | Available from publisher's website |
No items available.