Fabry-perot-type antireflective coating for deep-ultraviolet binary photomask applications. (Record no. 11993353)

MARC details
000 -LEADER
fixed length control field 00826 a2200241 4500
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20250514035634.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 200207s 0 0 eng d
022 ## - INTERNATIONAL STANDARD SERIAL NUMBER
International Standard Serial Number 1559-128X
024 7# - OTHER STANDARD IDENTIFIER
Standard number or code 10.1364/ao.41.003961
Source of number or code doi
040 ## - CATALOGING SOURCE
Original cataloging agency NLM
Language of cataloging eng
Transcribing agency NLM
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Chen, Hsuen-Li
264 #0 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE
Date of production, publication, distribution, manufacture, or copyright notice 20020724
245 00 - TITLE STATEMENT
Title Fabry-perot-type antireflective coating for deep-ultraviolet binary photomask applications.
Medium [electronic resource]
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Name of publisher, distributor, etc. Applied optics
Date of publication, distribution, etc. Jul 2002
300 ## - PHYSICAL DESCRIPTION
Extent 3961-5 p.
Other physical details digital
500 ## - GENERAL NOTE
General note Publication Type: Journal Article
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Chu, Tieh-Chi
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Hsu, Chien-Kui
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Ko, Fu-Hsiang
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Huang, Tiao-Yuan
773 0# - HOST ITEM ENTRY
Title Applied optics
Related parts vol. 41
-- no. 19
-- p. 3961-5
856 40 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier <a href="https://doi.org/10.1364/ao.41.003961">https://doi.org/10.1364/ao.41.003961</a>
Public note Available from publisher's website

No items available.