Thin-Film Engineering of Mechanical Fragmentation Properties of Atomic-Layer-Deposited Metal Oxides.

Ruoho, Mikko

Thin-Film Engineering of Mechanical Fragmentation Properties of Atomic-Layer-Deposited Metal Oxides. [electronic resource] - Nanomaterials (Basel, Switzerland) Mar 2020

Publication Type: Journal Article

2079-4991

10.3390/nano10030558 doi