Comparison of three focus sensors for optical topography measurement of rough surfaces.

Šarbort, Martin

Comparison of three focus sensors for optical topography measurement of rough surfaces. [electronic resource] - Optics express Nov 2019 - 33459-33473 p. digital

Publication Type: Journal Article

ISSN: 1094-4087

Standard No.: 10.1364/OE.27.033459 doi

Comparison of three focus sensors for optical topography measurement of rough surfaces.

APA

Šarbort M., Holá M., Pavelka J., Schovánek P., Řeřucha Š., Oulehla J., Fořt T. & Lazar J. (20200103). Comparison of three focus sensors for optical topography measurement of rough surfaces. : Optics express.

Chicago

Šarbort Martin, Holá Miroslava, Pavelka Jan, Schovánek Petr, Řeřucha Šimon, Oulehla Jindřich, Fořt Tomáš and Lazar Josef. 20200103. Comparison of three focus sensors for optical topography measurement of rough surfaces. : Optics express.

Harvard

Šarbort M., Holá M., Pavelka J., Schovánek P., Řeřucha Š., Oulehla J., Fořt T. and Lazar J. (20200103). Comparison of three focus sensors for optical topography measurement of rough surfaces. : Optics express.

MLA

Šarbort Martin, Holá Miroslava, Pavelka Jan, Schovánek Petr, Řeřucha Šimon, Oulehla Jindřich, Fořt Tomáš and Lazar Josef. Comparison of three focus sensors for optical topography measurement of rough surfaces. : Optics express. 20200103.

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