Crystalline characteristics of annealed AlN films by pulsed laser treatment for solidly mounted resonator applications.

Lin, H K

Crystalline characteristics of annealed AlN films by pulsed laser treatment for solidly mounted resonator applications. [electronic resource] - BMC chemistry Dec 2019 - 30 p. digital

Publication Type: Journal Article

2661-801X

10.1186/s13065-019-0550-6 doi