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3D push-pull heterodyne interferometer for SPM metrology.

Kazieva, T V

3D push-pull heterodyne interferometer for SPM metrology. [electronic resource] - Applied optics May 2019 - 4000-4006 p. digital

Publication Type: Journal Article

ISSN: 1539-4522

Standard No.: 10.1364/AO.58.004000 doi

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