Estimating Step Heights from Top-Down SEM Images.
Arat, Kerim Tugrul
Estimating Step Heights from Top-Down SEM Images. [electronic resource] - Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada Aug 2019 - 903-911 p. digital
Publication Type: Journal Article
1435-8115
10.1017/S143192761900062X doi
Estimating Step Heights from Top-Down SEM Images. [electronic resource] - Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada Aug 2019 - 903-911 p. digital
Publication Type: Journal Article
1435-8115
10.1017/S143192761900062X doi