Estimating Step Heights from Top-Down SEM Images.

Arat, Kerim Tugrul

Estimating Step Heights from Top-Down SEM Images. [electronic resource] - Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada Aug 2019 - 903-911 p. digital

Publication Type: Journal Article

1435-8115

10.1017/S143192761900062X doi