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Building a Casimir metrology platform with a commercial MEMS sensor.

Stange, Alexander

Building a Casimir metrology platform with a commercial MEMS sensor. [electronic resource] - Microsystems & nanoengineering 2019 - 14 p. digital

Publication Type: Journal Article

ISSN: 2055-7434

Standard No.: 10.1038/s41378-019-0054-5 doi

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