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Room-temperature, atmospheric-pressure microsputtering of dense, electrically conductive, sub-100 nm gold films.

Kornbluth, Y S

Room-temperature, atmospheric-pressure microsputtering of dense, electrically conductive, sub-100 nm gold films. [electronic resource] - Nanotechnology Jul 2019 - 285602 p. digital

Publication Type: Journal Article

ISSN: 1361-6528

Standard No.: 10.1088/1361-6528/ab1281 doi

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