Optical properties and fabrication of dielectric metasurfaces based on amorphous silicon nanodisk arrays.

Visser, D

Optical properties and fabrication of dielectric metasurfaces based on amorphous silicon nanodisk arrays. [electronic resource] - Optics express Feb 2019 - 5353-5367 p. digital

Publication Type: Journal Article

1094-4087

10.1364/OE.27.005353 doi