The Effect of Microwave Annealing of Reliability Characteristics on Amorphous IGZO Thin Film Transistors.

Wu, Chien-Hung

The Effect of Microwave Annealing of Reliability Characteristics on Amorphous IGZO Thin Film Transistors. [electronic resource] - Journal of nanoscience and nanotechnology Apr 2019 - 2189-2192 p. digital

Publication Type: Journal Article

1533-4880

10.1166/jnn.2019.15996 doi