In situ noncontact measurement system and two-step compensation strategy for ultra-precision diamond machining.

Yu, Jun

In situ noncontact measurement system and two-step compensation strategy for ultra-precision diamond machining. [electronic resource] - Optics express Nov 2018 - 30724-30739 p. digital

Publication Type: Journal Article

1094-4087

10.1364/OE.26.030724 doi