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Simultaneous reflectometry and interferometry for measuring thin-film thickness and curvature.

Arends, A A

Simultaneous reflectometry and interferometry for measuring thin-film thickness and curvature. [electronic resource] - The Review of scientific instruments May 2018 - 055117 p. digital

Publication Type: Journal Article

ISSN: 1089-7623

Standard No.: 10.1063/1.5021704 doi

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