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A microelectromechanical systems (MEMS) force-displacement transducer for sub-5 nm nanoindentation and adhesion measurements.

Zhang, Youfeng

A microelectromechanical systems (MEMS) force-displacement transducer for sub-5 nm nanoindentation and adhesion measurements. [electronic resource] - The Review of scientific instruments Apr 2018 - 045109 p. digital

Publication Type: Journal Article

ISSN: 1089-7623

Standard No.: 10.1063/1.5021046 doi

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