High-power modular LED-based illumination systems for mask-aligner lithography.
Bernasconi, Johana
High-power modular LED-based illumination systems for mask-aligner lithography. [electronic resource] - Optics express Apr 2018 - 11503-11512 p. digital
Publication Type: Journal Article
1094-4087
10.1364/OE.26.011503 doi
High-power modular LED-based illumination systems for mask-aligner lithography. [electronic resource] - Optics express Apr 2018 - 11503-11512 p. digital
Publication Type: Journal Article
1094-4087
10.1364/OE.26.011503 doi