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High-power modular LED-based illumination systems for mask-aligner lithography.

Bernasconi, Johana

High-power modular LED-based illumination systems for mask-aligner lithography. [electronic resource] - Optics express Apr 2018 - 11503-11512 p. digital

Publication Type: Journal Article

ISSN: 1094-4087

Standard No.: 10.1364/OE.26.011503 doi

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