Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors.

Baudet, E

Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors. [electronic resource] - Scientific reports 06 2017 - 3500 p. digital

Publication Type: Journal Article; Research Support, Non-U.S. Gov't

2045-2322

10.1038/s41598-017-03678-w doi