Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors.
Baudet, E
Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors. [electronic resource] - Scientific reports 06 2017 - 3500 p. digital
Publication Type: Journal Article; Research Support, Non-U.S. Gov't
2045-2322
10.1038/s41598-017-03678-w doi
Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors. [electronic resource] - Scientific reports 06 2017 - 3500 p. digital
Publication Type: Journal Article; Research Support, Non-U.S. Gov't
2045-2322
10.1038/s41598-017-03678-w doi