Tomographic Mapping Analysis in the Depth Direction of High-Ge-Content SiGe Layers with Compositionally Graded Buffers Using Nanobeam X-ray Diffraction.
Shida, Kazuki
Tomographic Mapping Analysis in the Depth Direction of High-Ge-Content SiGe Layers with Compositionally Graded Buffers Using Nanobeam X-ray Diffraction. [electronic resource] - ACS applied materials & interfaces Apr 2017 - 13726-13732 p. digital
Publication Type: Journal Article
1944-8252
10.1021/acsami.7b01309 doi
Tomographic Mapping Analysis in the Depth Direction of High-Ge-Content SiGe Layers with Compositionally Graded Buffers Using Nanobeam X-ray Diffraction. [electronic resource] - ACS applied materials & interfaces Apr 2017 - 13726-13732 p. digital
Publication Type: Journal Article
1944-8252
10.1021/acsami.7b01309 doi