Tomographic Mapping Analysis in the Depth Direction of High-Ge-Content SiGe Layers with Compositionally Graded Buffers Using Nanobeam X-ray Diffraction.

Shida, Kazuki

Tomographic Mapping Analysis in the Depth Direction of High-Ge-Content SiGe Layers with Compositionally Graded Buffers Using Nanobeam X-ray Diffraction. [electronic resource] - ACS applied materials & interfaces Apr 2017 - 13726-13732 p. digital

Publication Type: Journal Article

1944-8252

10.1021/acsami.7b01309 doi