Si-rich Silicon Nitride for Nonlinear Signal Processing Applications.

Lacava, Cosimo

Si-rich Silicon Nitride for Nonlinear Signal Processing Applications. [electronic resource] - Scientific reports 02 2017 - 22 p. digital

Publication Type: Journal Article; Research Support, Non-U.S. Gov't

2045-2322

10.1038/s41598-017-00062-6 doi