Rotatable Offner imaging system for ellipsometric measurement.

Jin, L

Rotatable Offner imaging system for ellipsometric measurement. [electronic resource] - The Review of scientific instruments Jan 2017 - 013704 p. digital

Publication Type: Journal Article

ISSN: 1089-7623

Standard No.: 10.1063/1.4973778 doi

Rotatable Offner imaging system for ellipsometric measurement.

APA

Jin L., Tanaka T., Kondoh E., Gelloz B., Sano K., Fujio I., Kajiyama Y. & Uehara M. (20180205). Rotatable Offner imaging system for ellipsometric measurement. : The Review of scientific instruments.

Chicago

Jin L, Tanaka T, Kondoh E, Gelloz B, Sano K, Fujio I, Kajiyama Y and Uehara M. 20180205. Rotatable Offner imaging system for ellipsometric measurement. : The Review of scientific instruments.

Harvard

Jin L., Tanaka T., Kondoh E., Gelloz B., Sano K., Fujio I., Kajiyama Y. and Uehara M. (20180205). Rotatable Offner imaging system for ellipsometric measurement. : The Review of scientific instruments.

MLA

Jin L, Tanaka T, Kondoh E, Gelloz B, Sano K, Fujio I, Kajiyama Y and Uehara M. Rotatable Offner imaging system for ellipsometric measurement. : The Review of scientific instruments. 20180205.

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