Directional elastic wave propagation in high-aspect-ratio photoresist gratings: liquid infiltration and aging.
Alonso-Redondo, E
Directional elastic wave propagation in high-aspect-ratio photoresist gratings: liquid infiltration and aging. [electronic resource] - Nanoscale Feb 2017 - 2739-2747 p. digital
Publication Type: Journal Article
2040-3372
10.1039/c6nr08312a doi
Directional elastic wave propagation in high-aspect-ratio photoresist gratings: liquid infiltration and aging. [electronic resource] - Nanoscale Feb 2017 - 2739-2747 p. digital
Publication Type: Journal Article
2040-3372
10.1039/c6nr08312a doi