Directional elastic wave propagation in high-aspect-ratio photoresist gratings: liquid infiltration and aging.

Alonso-Redondo, E

Directional elastic wave propagation in high-aspect-ratio photoresist gratings: liquid infiltration and aging. [electronic resource] - Nanoscale Feb 2017 - 2739-2747 p. digital

Publication Type: Journal Article

2040-3372

10.1039/c6nr08312a doi