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Interfacial coherency stress distribution in TiN/AlN bilayer and multilayer films studied by FEM analysis.

Chawla, Vipin

Interfacial coherency stress distribution in TiN/AlN bilayer and multilayer films studied by FEM analysis. [electronic resource] - Computational materials science Apr 2012 - 211-216 p. digital

Publication Type: Journal Article

ISSN: 0927-0256

Standard No.: 10.1016/j.commatsci.2011.11.024 doi

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