Atomic Layer Deposition of Al2O3 on WSe2 Functionalized by Titanyl Phthalocyanine.
Park, Jun Hong
Atomic Layer Deposition of Al2O3 on WSe2 Functionalized by Titanyl Phthalocyanine. [electronic resource] - ACS nano 07 2016 - 6888-96 p. digital
Publication Type: Journal Article; Research Support, U.S. Gov't, Non-P.H.S.; Research Support, Non-U.S. Gov't
1936-086X
10.1021/acsnano.6b02648 doi
Atomic Layer Deposition of Al2O3 on WSe2 Functionalized by Titanyl Phthalocyanine. [electronic resource] - ACS nano 07 2016 - 6888-96 p. digital
Publication Type: Journal Article; Research Support, U.S. Gov't, Non-P.H.S.; Research Support, Non-U.S. Gov't
1936-086X
10.1021/acsnano.6b02648 doi