Design and characterization of a microelectromechanical system electro-thermal linear motor with interlock mechanism for micro manipulators.
Hu, Tengjiang
Design and characterization of a microelectromechanical system electro-thermal linear motor with interlock mechanism for micro manipulators. [electronic resource] - The Review of scientific instruments Mar 2016 - 035001 p. digital
Publication Type: Journal Article
1089-7623
10.1063/1.4943266 doi
Design and characterization of a microelectromechanical system electro-thermal linear motor with interlock mechanism for micro manipulators. [electronic resource] - The Review of scientific instruments Mar 2016 - 035001 p. digital
Publication Type: Journal Article
1089-7623
10.1063/1.4943266 doi