Physics-electrical hybrid model for real time impedance matching and remote plasma characterization in RF plasma sources.

Sudhir, Dass

Physics-electrical hybrid model for real time impedance matching and remote plasma characterization in RF plasma sources. [electronic resource] - The Review of scientific instruments Feb 2016 - 02B312 p. digital

Publication Type: Journal Article

1089-7623

10.1063/1.4932558 doi