New method of plasma immersion ion implantation and also deposition of industrial components using tubular fixture and plasma generated inside the tube by high voltage pulses.

Ueda, Mario

New method of plasma immersion ion implantation and also deposition of industrial components using tubular fixture and plasma generated inside the tube by high voltage pulses. [electronic resource] - The Review of scientific instruments Jan 2016 - 013902 p. digital

Publication Type: Journal Article

1089-7623

10.1063/1.4939013 doi