New method of plasma immersion ion implantation and also deposition of industrial components using tubular fixture and plasma generated inside the tube by high voltage pulses.
Ueda, Mario
New method of plasma immersion ion implantation and also deposition of industrial components using tubular fixture and plasma generated inside the tube by high voltage pulses. [electronic resource] - The Review of scientific instruments Jan 2016 - 013902 p. digital
Publication Type: Journal Article
1089-7623
10.1063/1.4939013 doi
New method of plasma immersion ion implantation and also deposition of industrial components using tubular fixture and plasma generated inside the tube by high voltage pulses. [electronic resource] - The Review of scientific instruments Jan 2016 - 013902 p. digital
Publication Type: Journal Article
1089-7623
10.1063/1.4939013 doi