Alternative nano-structured thin-film materials used as durable thermal nanoimprint lithography templates.
Bossard, M
Alternative nano-structured thin-film materials used as durable thermal nanoimprint lithography templates. [electronic resource] - Nanotechnology Feb 2016 - 075302 p. digital
Publication Type: Journal Article; Research Support, Non-U.S. Gov't
1361-6528
10.1088/0957-4484/27/7/075302 doi
Alternative nano-structured thin-film materials used as durable thermal nanoimprint lithography templates. [electronic resource] - Nanotechnology Feb 2016 - 075302 p. digital
Publication Type: Journal Article; Research Support, Non-U.S. Gov't
1361-6528
10.1088/0957-4484/27/7/075302 doi