Effects of La Incorporation in Hf Based Dielectric on Leakage Conduction and Carrier Scattering Mechanisms.

You, Seung-Won

Effects of La Incorporation in Hf Based Dielectric on Leakage Conduction and Carrier Scattering Mechanisms. [electronic resource] - Journal of nanoscience and nanotechnology Oct 2015 - 7590-2 p. digital

Publication Type: Journal Article; Research Support, Non-U.S. Gov't

1533-4899

10.1166/jnn.2015.11165 doi