A sensitive optical micro-machined ultrasound sensor (OMUS) based on a silicon photonic ring resonator on an acoustical membrane.
Leinders, S M
A sensitive optical micro-machined ultrasound sensor (OMUS) based on a silicon photonic ring resonator on an acoustical membrane. [electronic resource] - Scientific reports Sep 2015 - 14328 p. digital
Publication Type: Journal Article; Research Support, Non-U.S. Gov't
2045-2322
10.1038/srep14328 doi
A sensitive optical micro-machined ultrasound sensor (OMUS) based on a silicon photonic ring resonator on an acoustical membrane. [electronic resource] - Scientific reports Sep 2015 - 14328 p. digital
Publication Type: Journal Article; Research Support, Non-U.S. Gov't
2045-2322
10.1038/srep14328 doi