The Properties of Cu Thin Films on Ru Depending on the ALD Temperature.
Yoon, Hyeong-Chul
The Properties of Cu Thin Films on Ru Depending on the ALD Temperature. [electronic resource] - Journal of nanoscience and nanotechnology Feb 2015 - 1601-4 p. digital
Publication Type: Journal Article; Research Support, Non-U.S. Gov't
1533-4899
10.1166/jnn.2015.9286 doi
The Properties of Cu Thin Films on Ru Depending on the ALD Temperature. [electronic resource] - Journal of nanoscience and nanotechnology Feb 2015 - 1601-4 p. digital
Publication Type: Journal Article; Research Support, Non-U.S. Gov't
1533-4899
10.1166/jnn.2015.9286 doi