Mobility degradation mechanisms of MOSFETs with a high-k dielectric layer.

Jung, Hyun Soo

Mobility degradation mechanisms of MOSFETs with a high-k dielectric layer. [electronic resource] - Journal of nanoscience and nanotechnology Nov 2014 - 8215-8 p. digital

Publication Type: Journal Article; Research Support, Non-U.S. Gov't

1533-4899

10.1166/jnn.2014.9896 doi