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Performance and stress analysis of metal oxide films for CMOS-integrated gas sensors.

Filipovic, Lado

Performance and stress analysis of metal oxide films for CMOS-integrated gas sensors. [electronic resource] - Sensors (Basel, Switzerland) Mar 2015 - 7206-27 p. digital

Publication Type: Journal Article

ISSN: 1424-8220

Standard No.: 10.3390/s150407206 doi

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