Miniature multi-contact MEMS switch for broadband terahertz modulation.

Unlu, Mehmet

Miniature multi-contact MEMS switch for broadband terahertz modulation. [electronic resource] - Optics express Dec 2014 - 32245-60 p. digital

Publication Type: Journal Article; Research Support, Non-U.S. Gov't

1094-4087

10.1364/OE.22.032245 doi


Computer-Aided Design
Equipment Design
Equipment Failure Analysis
Micro-Electrical-Mechanical Systems--instrumentation
Microelectrodes
Miniaturization
Optical Devices
Signal Processing, Computer-Assisted--instrumentation
Surface Plasmon Resonance--instrumentation
Telecommunications--instrumentation
Terahertz Radiation