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Iterative algorithm for absolute planarity calibration in three-flat test.

He, Yuhang

Iterative algorithm for absolute planarity calibration in three-flat test. [electronic resource] - Optics express Nov 2014 - 27669-74 p. digital

Publication Type: Journal Article

ISSN: 1094-4087

Standard No.: 10.1364/OE.22.027669 doi

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