On-chip copper-dielectric interference filters for manufacturing of ambient light and proximity CMOS sensors.

Frey, Laurent

On-chip copper-dielectric interference filters for manufacturing of ambient light and proximity CMOS sensors. [electronic resource] - Applied optics Jul 2014 - 4493-502 p. digital

Publication Type: Journal Article

1539-4522

10.1364/AO.53.004493 doi