On-chip copper-dielectric interference filters for manufacturing of ambient light and proximity CMOS sensors.
Frey, Laurent
On-chip copper-dielectric interference filters for manufacturing of ambient light and proximity CMOS sensors. [electronic resource] - Applied optics Jul 2014 - 4493-502 p. digital
Publication Type: Journal Article
1539-4522
10.1364/AO.53.004493 doi
On-chip copper-dielectric interference filters for manufacturing of ambient light and proximity CMOS sensors. [electronic resource] - Applied optics Jul 2014 - 4493-502 p. digital
Publication Type: Journal Article
1539-4522
10.1364/AO.53.004493 doi