Elucidating the origin of spurious modes in aluminum nitride microresonators using a 2-D finite-element model.

Branch, Darren W

Elucidating the origin of spurious modes in aluminum nitride microresonators using a 2-D finite-element model. [electronic resource] - IEEE transactions on ultrasonics, ferroelectrics, and frequency control May 2014 - 729-38 p. digital

Publication Type: Journal Article; Research Support, U.S. Gov't, Non-P.H.S.

1525-8955

10.1109/TUFFC.2014.6805687 doi