Impact of plasma pretreatment and pore size on the sealing of ultra-low-k dielectrics by self-assembled monolayers.
Sun, Yiting
Impact of plasma pretreatment and pore size on the sealing of ultra-low-k dielectrics by self-assembled monolayers. [electronic resource] - Langmuir : the ACS journal of surfaces and colloids Apr 2014 - 3832-44 p. digital
Publication Type: Journal Article
1520-5827
10.1021/la404165n doi
Impact of plasma pretreatment and pore size on the sealing of ultra-low-k dielectrics by self-assembled monolayers. [electronic resource] - Langmuir : the ACS journal of surfaces and colloids Apr 2014 - 3832-44 p. digital
Publication Type: Journal Article
1520-5827
10.1021/la404165n doi