Short-range six-axis interferometer controlled positioning for scanning probe microscopy.
Lazar, Josef
Short-range six-axis interferometer controlled positioning for scanning probe microscopy. [electronic resource] - Sensors (Basel, Switzerland) Jan 2014 - 877-86 p. digital
Publication Type: Journal Article; Research Support, Non-U.S. Gov't
1424-8220
10.3390/s140100877 doi
Short-range six-axis interferometer controlled positioning for scanning probe microscopy. [electronic resource] - Sensors (Basel, Switzerland) Jan 2014 - 877-86 p. digital
Publication Type: Journal Article; Research Support, Non-U.S. Gov't
1424-8220
10.3390/s140100877 doi