Finite element simulations of electrostatic dopant potentials in thin semiconductor specimens for electron holography.

Somodi, P K

Finite element simulations of electrostatic dopant potentials in thin semiconductor specimens for electron holography. [electronic resource] - Ultramicroscopy Nov 2013 - 160-6 p. digital

Publication Type: Journal Article; Research Support, Non-U.S. Gov't

1879-2723

10.1016/j.ultramic.2013.06.023 doi


Electrons
Holography--instrumentation
Microscopy, Electron, Transmission--instrumentation
Semiconductors
Static Electricity