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Structural and optical characterization of pure Si-rich nitride thin films.

Debieu, Olivier

Structural and optical characterization of pure Si-rich nitride thin films. [electronic resource] - Nanoscale research letters Jan 2013 - 31 p. digital

Publication Type: Journal Article

ISSN: 1931-7573

Standard No.: 10.1186/1556-276X-8-31 doi

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