Effect of cladding layer and subsequent heat treatment on hydrogenated amorphous silicon waveguides.
Zhu, Shiyang
Effect of cladding layer and subsequent heat treatment on hydrogenated amorphous silicon waveguides. [electronic resource] - Optics express Oct 2012 - 23676-83 p. digital
Publication Type: Journal Article; Research Support, Non-U.S. Gov't
1094-4087
10.1364/OE.20.023676 doi
Equipment Design
Equipment Failure Analysis
Hot Temperature
Hydrogen--chemistry
Materials Testing
Refractometry--instrumentation
Silicon Dioxide--chemistry
Surface Plasmon Resonance--instrumentation
Effect of cladding layer and subsequent heat treatment on hydrogenated amorphous silicon waveguides. [electronic resource] - Optics express Oct 2012 - 23676-83 p. digital
Publication Type: Journal Article; Research Support, Non-U.S. Gov't
1094-4087
10.1364/OE.20.023676 doi
Equipment Design
Equipment Failure Analysis
Hot Temperature
Hydrogen--chemistry
Materials Testing
Refractometry--instrumentation
Silicon Dioxide--chemistry
Surface Plasmon Resonance--instrumentation