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Reflection-based near-field ellipsometry for thin film characterization.

Liu, Zhuang

Reflection-based near-field ellipsometry for thin film characterization. [electronic resource] - Ultramicroscopy Jan 2013 - 26-34 p. digital

Publication Type: Journal Article

ISSN: 1879-2723

Standard No.: 10.1016/j.ultramic.2012.08.003 doi

Subjects--Topical Terms:
Nanostructures--ultrastructure
Spectroscopy, Near-Infrared--methods

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