Nano-scale stick-slip friction model for the chatter scratch generated by chemical mechanical polishing process.
Kim, Hong Jin
Nano-scale stick-slip friction model for the chatter scratch generated by chemical mechanical polishing process. [electronic resource] - Journal of nanoscience and nanotechnology Jul 2012 - 5683-6 p. digital
Publication Type: Journal Article
1533-4880
10.1166/jnn.2012.6389 doi
Nano-scale stick-slip friction model for the chatter scratch generated by chemical mechanical polishing process. [electronic resource] - Journal of nanoscience and nanotechnology Jul 2012 - 5683-6 p. digital
Publication Type: Journal Article
1533-4880
10.1166/jnn.2012.6389 doi