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Sub 50 nm nano-patterns with carbon based spin-on organic hardmask.

Shin, Ju-Hyeon

Sub 50 nm nano-patterns with carbon based spin-on organic hardmask. [electronic resource] - Journal of nanoscience and nanotechnology Apr 2012 - 3364-8 p. digital

Publication Type: Journal Article

ISSN: 1533-4880

Standard No.: 10.1166/jnn.2012.5646 doi

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