Effect of beam limiting aperture and collector potential on multi-element focused ion beams.
Paul, Samit
Effect of beam limiting aperture and collector potential on multi-element focused ion beams. [electronic resource] - The Review of scientific instruments Feb 2012 - 02B714 p. digital
Publication Type: Journal Article
1089-7623
10.1063/1.3672117 doi
Effect of beam limiting aperture and collector potential on multi-element focused ion beams. [electronic resource] - The Review of scientific instruments Feb 2012 - 02B714 p. digital
Publication Type: Journal Article
1089-7623
10.1063/1.3672117 doi