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Wafer scale interdigitated nanoelectrode devices functionalized using a MEMS-based deposition system.

Martinez-Rivas, A

Wafer scale interdigitated nanoelectrode devices functionalized using a MEMS-based deposition system. [electronic resource] - Nanotechnology Mar 2012 - 105302 p. digital

Publication Type: Journal Article

ISSN: 1361-6528

Standard No.: 10.1088/0957-4484/23/10/105302 doi

Subjects--Topical Terms:
Biosensing Techniques--instrumentation
Equipment Design
Micro-Electrical-Mechanical Systems--instrumentation
Microelectrodes
Nanotechnology--instrumentation
Polymethyl Methacrylate

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