Image sensor as a three-channel spectrometer with application to in situ monitoring of wet etching.
Gerling, John
Image sensor as a three-channel spectrometer with application to in situ monitoring of wet etching. [electronic resource] - The Review of scientific instruments Jul 2011 - 075103 p. digital
Publication Type: Journal Article; Research Support, Non-U.S. Gov't
1089-7623
10.1063/1.3606445 doi
Aluminum--chemistry
Copper--chemistry
Spectrum Analysis--methods
Time Factors
Image sensor as a three-channel spectrometer with application to in situ monitoring of wet etching. [electronic resource] - The Review of scientific instruments Jul 2011 - 075103 p. digital
Publication Type: Journal Article; Research Support, Non-U.S. Gov't
1089-7623
10.1063/1.3606445 doi
Aluminum--chemistry
Copper--chemistry
Spectrum Analysis--methods
Time Factors