Antireflection coatings for deep ultraviolet optics deposited by magnetron sputtering from Al targets.
Liao, Bo-Huei
Antireflection coatings for deep ultraviolet optics deposited by magnetron sputtering from Al targets. [electronic resource] - Optics express Apr 2011 - 7507-12 p. digital
Publication Type: Journal Article; Research Support, Non-U.S. Gov't
1094-4087
10.1364/OE.19.007507 doi
Antireflection coatings for deep ultraviolet optics deposited by magnetron sputtering from Al targets. [electronic resource] - Optics express Apr 2011 - 7507-12 p. digital
Publication Type: Journal Article; Research Support, Non-U.S. Gov't
1094-4087
10.1364/OE.19.007507 doi