Combined AFM nano-machining and reactive ion etching to fabricate high aspect ratio structures.
Peng, Ping
Combined AFM nano-machining and reactive ion etching to fabricate high aspect ratio structures. [electronic resource] - Journal of nanoscience and nanotechnology Nov 2010 - 7287-90 p. digital
Publication Type: Journal Article
1533-4880
10.1166/jnn.2010.2858 doi
Combined AFM nano-machining and reactive ion etching to fabricate high aspect ratio structures. [electronic resource] - Journal of nanoscience and nanotechnology Nov 2010 - 7287-90 p. digital
Publication Type: Journal Article
1533-4880
10.1166/jnn.2010.2858 doi