Nanopattern fabrication by tip plowing technology on 55 nm grating with stitching image method.

Chen, Chao-Chang A

Nanopattern fabrication by tip plowing technology on 55 nm grating with stitching image method. [electronic resource] - Journal of nanoscience and nanotechnology Jul 2010 - 4411-6 p. digital

Publication Type: Journal Article

1533-4880

10.1166/jnn.2010.2354 doi